This book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconductor (MOS) and complementary MOS (CMOS) devices, SoC technology, integrated circuit testing and verification, and other important topics in the field. ?Several chapters cover state-of-the-art microfabrication techniques and materials as enabling technologies for the microsystems. Reliability issues concerning both electronic and mechanical aspects of these devices and systems are also addressed in various chapters.
| Specifications |
Descriptions |
| ISBN |
9789533070278 |
| Year |
2016 |
| Binding |
Hardcover |
| Subject |
Electrical & Electronics Engineering |
| Pages |
526 |
| Weight |
0.4 |
| Readership |
NA |
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